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Micro -nanofabrication :technologies and applications

620.5
CUI

61866

Cui, Zheng Micro -nanofabrication :technologies and applications / by Zheng Cui. - London : Springer, 2005
x,304p.:ill. Includes index 3-540-28922-4 * Electron beam lithography Micro-nanofabrication Nanotechnology

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