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Silicon devices and process integration : deep submicron and nano-scale technologies

621.3815
EL

88134

El-Kareh, Badih Silicon devices and process integration : deep submicron and nano-scale technologies / by Badih El-Kareh. - New York : Springer, 2009
xxv,597p.;ill. Includes bibliographical references and index 9780387367989 ? 129.99 (Rs. 9801.25) * Electronics

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