MEMS/NEMS handbook techniques and applications
5. V. (xv,380p. :ill.)
Includes index.
Content notes : Contents: v. 1. design methods-
Microelectromechanical methods Nanotechnology
5. V. (xv,380p. :ill.)
Includes index.
Content notes : Contents: v. 1. design methods-
Microelectromechanical methods Nanotechnology