MEMS/NEMS handbook techniques and applications
5. V. (xviii, 434p. :ill)
includes index.
Content notes : Contents: v. 3. manufacturing methods
Microelectromechanical methods Nanotechnology
5. V. (xviii, 434p. :ill)
includes index.
Content notes : Contents: v. 3. manufacturing methods
Microelectromechanical methods Nanotechnology