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MEMS/NEMS handbook techniques and applications

620.5
MEM

61374
88142

MEMS/NEMS handbook techniques and applications / edited by Cornelius T.Leondes. - New York : Springer, 2006
5.V(xviii, 386p. :ill) includes index Content notes : Content.V.4.sensors and actuators 0-387-24520-0 Rs. 79848.60 * Micro electromechanical system fabrication techniques Nano technology * Leondes, Cornelius T., Ed. * Title

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