MEMS/NEMS handbook techniques and applications
5. V. (xviii, 556p. :ill.)
Includes index.
Content notes : Contents: v. 5. medical applications of MOEMS
Microelectromechanical methods Nanotechnology
5. V. (xviii, 556p. :ill.)
Includes index.
Content notes : Contents: v. 5. medical applications of MOEMS
Microelectromechanical methods Nanotechnology