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Silicon devices and process integration : deep submicron and nano-scale technologies

621.3815
KAR

82181
90862

El-Kareh, Badih Silicon devices and process integration : deep submicron and nano-scale technologies / by Badih El-Kareh . - New York : Springer, 2009
xxv, 597 p. ; 25 cm 9780387367989 Euro99.95 Rs.7356.32 and Euro 129.99, Rs. 11,673.10 (for acc. no. 90862) * Electronics and Communication Enginering Nanotechnology

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