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MEMS/NEMS handbook techniques and applications

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MEM

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MEMS/NEMS handbook techniques and applications / edited by Cornelius T. Leondes. - New York : Springer, 2006
5v. (xviii, 380; xviii, 332; xviii, 434, xviii, 386;xviii,556p.): ill ;20cm Content notes : v1: Design Method; v2: Fabrication Techniques; v3: Manufacturing Method; v4: Sensors and Actuators; v5: Medical Applications and MOEMS 9780387245201 Euro 1059.00 (Rs.79425.00) 5vol.set price * Manufacturing methods ME Microelectromechanical methods Nanotechnology * Leondes, Cornelius T. * Title

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