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Microsensors, MEMS, and smart devices

621.381
GAR

46257

Gardner, Julian W. Microsensors, MEMS, and smart devices / by Julian W. Gardner, Vijay K. Varadan and Osama O. Awadelkarim. - New York : Johan Wiley, 2001
xvi,503p.:ill. Includes index bibliography 0-471-86109-X Rs. 4536.00 * detectors Intelligent control systems Microelectromechanical systems * Varadan, Vijay K. * Title

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