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MEMS/NEMS handbook techniques and applications edited by Cornelius T.Leondes

Contributor(s): Material type: TextTextLanguage: English Publication details: New York Springer 2006Description: 5.V(xviii, 332p. :ill)ISBN:
  • 9780387245201
Subject(s): DDC classification:
  • 620.5 MEM
Contents:
Content.V.2.fabrication techniques for MEMS/NEMS
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includes index

Content.V.2.fabrication techniques for MEMS/NEMS

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