Plasma electronics: applications In microelectronic device fabrication by Toshiaki Makabe and Zoran Lj. Petrovic

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Material type: Text

TextLanguage: English Series: Series in plasma physicsPublication details: Boca Raton CRC Press 2020Description: xxxv, 376PISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	National Institute of Technology, Silchar Central Library@NITS	621.381 MAK (Browse shelf(Opens below))	Available		107702

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