TY  - BOOK
AU  - Hoffman, Dorothy M. ed.
TI  - Handbook of vacuum science and technology
SN  - 0-12-352065-7
U1  - 621.55 
PY  - 1998///
CY  - San Diego
PB  - Academic
KW  - Large-Scale vacuum-Based processed
KW  - Surface physics
KW  - Vacuum technology-Handbooks
N1  - Includes bibliographical references and index; Ahuja
ER  -