TY  - BOOK
AU  - Nagchoudhuri, D.
TI  - Principles of microelectronics technology
SN  - 81-7544-003-1
U1  - 621.381 
PY  - 1998///
CY  - New Delhi
PB  - Wheeler
KW  - Etching
KW  - Micro electronics
KW  - Plasma Depostion
N1  - Includes index; Silchar Book
ER  -