TY - BOOK AU - Kaltenbacher, Manfred TI - Numerical simulation of mechatronic sensors and actuators SN - 3-540-20458-X U1 - 621.3 PY - 2004/// CY - Berlin PB - Springer KW - Electrical device KW - Mecatronic system KW - Micro elecmechanical system N1 - Includes index; RBC ER -