TY - BOOK AU - Bao, Min-Hang TI - Micro mechanical transducers:pressure sensors, accelerometers and gyroscopes SN - 0 444 50558 X U1 - 681.2 PY - 2004/// CY - Amsterdam PB - Elsevier KW - Air damping KW - Micromechanical system KW - Transducens- Handbook N1 - Content.V.8:handbook of sensors and actuators;includes index; TBS ER -