TY  - BOOK
AU  - Cui, Zheng
TI  - Micro -nanofabrication :technologies and applications
SN  - 3-540-28922-4
U1  - 620.5 
PY  - 2005///
CY  - London
PB  - Springer
KW  - Electron beam lithography
KW  - Micro-nanofabrication
KW  - Nanotechnology
N1  - Includes index; Hi-tech book services
ER  -