TY  - BOOK
AU  - Jackson, Mark J., ed.
TI  - Microfabrication and nanomanufacturing
SN  - 0-8247-2431-3
U1  - 620.5 
PY  - 2006///
CY  - London
PB  - Taylor
KW  - Microfabrication
KW  - Nanomanufacturing
KW  - Nanotechnology
N1  - Includes index; Hi-Tech
ER  -