TY  - BOOK
AU  - May, Gary S. 
AU  - Aze, Simon M. 
TI  - Fundamentals of semiconductor fabrication
SN  - 9812-53-072-x
U1  - 621.38152 
PY  - 2006///
CY  - Hoboken
PB  - John Wiley
KW  - Semiconductors
N1  - Includes index
ER  -