TY  - BOOK
AU  - Liu, Ai-Qun
TI  - Photonic MEMS devices : Design, fabrication and control
SN  - 9781420045680
U1  - 621.381/LIU 
PY  - 2009///
CY  - Boca Raton
PB  - CRC Press
KW  - Electronics
N1  - includes index; RBC, New Delhi
ER  -