TY  - BOOK
AU  - Lobontiu, Nicolae 
AU  - Garcia, Ephrahim
TI  - Mechanics of microelectromechanical systems
SN  - 9788181288493
U1  - 621.381/LOB 
PY  - 2005///
CY  - New York
PB  - Kluwer Academic Publishers 
KW  - Mechanical Engineering
N1  - includes index; RBC, New Delhi
ER  -