TY  - BOOK
AU  - Adams, Thomas M. 
AU  - Layton, Richard A.
TI  - Introductory MEMS: fabrication and applications
SN  - 9780387095103
U1  - 621.381ADA 
PY  - 2010///
CY  - New York
PB  - Springer
KW  - electronics
N1  - Sibyl, Kolkata
ER  -