TY  - BOOK
AU  - Gad-el-Hak, Mohamed. ed.
TI  - MEMS: Introduction and fundamentals
SN  - 9780849391378
U1  - 621.381 
PY  - 2006///
CY  - Boca Raton
PB  - CRC Press
KW  - ECE
KW  - Microelectronics
KW  - Nanotechnology
N1  - Includes index; Sibyl, Kolkata
ER  -