TY  - BOOK
AU  - Fujita, H.,ed.
TI  - Micromachines as tools for nanotechnology
SN  - 81-8128-202-7
U1  - 620.5 
PY  - 2004///
CY  - New York
PB  - Springer
KW  - Microsystem
KW  - Nanostructures
KW  - Nanotechnology
N1  - Includes bibliographical references; RBC
ER  -