TY  - BOOK
AU  - Leondes, Cornelius T.
TI  - MEMS/NEMS handbook techniques and applications
SN  - 978038245201
U1  - 620.5 
PY  - 2006///
CY  - New York
PB  - Springer
KW  - Manufacturing methods
KW  - Microelectromechanical methods
KW  - Nanotechnology
N1  - Includes index; Contents: v. 1. design methods-; Roma books
ER  -