TY  - BOOK
AU  - Leondes, Cornelius T
AU  - .
TI  - MEMS/NEMS handbook techniques and applications
SN  - 9780387245201
U1  - 620.5 
PY  - 2006///
CY  - New York
PB  - Springer
KW  - Manufacturing methods
KW  - Microelectromechanical methods
KW  - Nanotechnology
N1  - includes index; Contents: v. 3. manufacturing methods; TBS
ER  -