TY  - BOOK
AU  - Leondes, Cornelius T.
TI  - MEMS/NEMS handbook techniques and applications
SN  - 0-387-24520-0
U1  - 620.5 
PY  - 2006///
CY  - New York
PB  - Springer
KW  - Micro electromechanical system fabrication techniques
KW  - Nano technology
N1  - includes index; Content.V.4.sensors and actuators; Roma books
ER  -