TY  - BOOK
AU  - El-Kareh, Badih
TI  - Silicon devices and process integration : deep submicron and nano-scale technologies
SN  - 9780387367989
U1  - 621.3815 
PY  - 2009///
CY  - New York
PB  - Springer
KW  - Electronics and Communication Enginering
KW  - Nanotechnology
N1  - Includes bibliographical references and index; Sibly, Kolkata
ER  -