TY  - BOOK
AU  - Ghandhi, Sorab K.
TI  - VLSI fabrication principles: silicon and gallium arsenide
SN  - 9788126517909
U1  - 621.38171 
PY  - 2012///; 2013
CY  - New Delhi
PB  - Wiley; Wiley India
KW  - 2. Electronics and communication
KW  - VLSI
KW  - VLSI- fabrication and principles
N1  - Includes bibliographical references and index; Sibyl, Kolkata; Orient Publications,Guwahati
ER  -