TY  - BOOK
AU  - Leondes, Cornelius T.
TI  - MEMS/NEMS handbook techniques and applications
SN  - 9780387245201
U1  - 620.5 
PY  - 2006///
CY  - New York
PB  - Springer
KW  - Manufacturing methods
KW  - ME
KW  - Microelectromechanical methods
KW  - Nanotechnology
N1  - Includes bibliographical references and index; v1: Design Method; v2: Fabrication Techniques; v3: Manufacturing Method; v4: Sensors and Actuators; v5: Medical Applications and MOEMS; Roam Books Int., New Delhi
ER  -