TY  - BOOK
AU  - Gardner, Julian W.
AU  - Varadan, Vijay K.
TI  - Microsensors, MEMS, and smart devices
SN  - 9788126540822
U1  - 621.381 
PY  - 2013///
CY  - New Delhi
PB  - Wiley India
KW  - detectors
KW  - Intelligent control systems
KW  - Microelectromechanical systems
N1  - Includes index; P.T.Books International
ER  -