TY  - BOOK
AU  - Motamedi, M. Edward 
TI  - Micro-opto-electro-mechanical systems
SN  - 9788122428339
U1  - 621.381 
PY  - 2010///
CY  - New Delhi
PB  - New Age International Pvt Ltd
KW  - ECE
KW  - Micro-optics
KW  - MEMS
ER  -