TY  - BOOK
AU  - Cui, Zheng
TI  - Nanofabrication: principles, capabilities and limits
SN  - 9788132204954
U1  - 620.5 
PY  - 2012///
CY  - N. Delhi
PB  - Springer India
KW  - Nanotechnology Electron beam lithography
KW  - Nanofabrication
N1  - Includes index
ER  -