TY  - BOOK
AU  - Johnstone, Robert W.
AU  - Parameswaran,M
TI  - An Introduction to Surface-Micromachining
SN  - 9781402080203
U1  - 671.3 
PY  - 2004///
CY  - London
PB  - Kluwer Academic Publication
KW  - Mechanical engineering and machinery
KW  - Machine shops and machine shop practice
N1  - Includes index
ER  -