TY  - BOOK
TI  - Microelectromechanical systems
SN  - 9781632383235
U1  - 621.381 
PY  - 2015///
CY  - New York
PB  - NY RESEARCH PRESS
KW  - MEMS
KW  - BioMEMS Devices
N1  - Includes index
ER  -