TY  - BOOK
AU  - Li, Simon 
AU  - Li, Suihua
TI  - 3D TCAD simulation for semiconductor processes, devices and optoelectronics 
SN  - 9781461404804
U1  - 621.38152 
PY  - 2012///
CY  - Heidelberg
PB  - Springer
KW  - EIE
KW  - Semiconductor technology
N1  - Includes bibliographical references and index
ER  -