TY  - BOOK
AU  - Mahalik, Nitaigour Premchand
TI  - MEMS
SN  - 9780070634459
U1  - 621.381 
PY  - 2019///
CY  - Chennai
PB  - McGraw Hill Education
KW  - ECE
KW  - Microelectronics
KW  - Nanotechnology
N1  - Includes index & appendix; Includes references
ER  -