TY  - BOOK
AU  - Bakhoum, Ezzat G.
TI  - Micro- and Nano-Scale Sensors and Transducers
SN  - 9781482250909
U1  - 621.381 
PY  - 2015///
CY  - Boca Raton
PB  - CRC Press, Taylor & Francis Group
KW  - EIE
KW  - Microelectromechanical systems
KW  - Electrical electronics engineering
N1  - Includes index
ER  -