TY  - BOOK
AU  - Grove, A. S.
TI  - Pysics and technology of semiconductor devices
U1  - 621.38152 
PY  - 1967///
CY  - New York
PB  - John Wiley
KW  - Solid state technolotgy
KW  - Thermal oxidation
N1  - Includes index
ER  -