TY  - BOOK
AU  - Bachmann, Klaus J.
TI  - Materials science of microelectronics
SN  - 0-89573-280-7
U1  - 621.381 
PY  - 1995///
CY  - Carolina
PB  - VCH
KW  - Materials- Electric propertics
KW  - Microelectronics- Materials
KW  - Semiconductor
N1  - Includes bibliographical references and index
ER  -