TY  - BOOK
AU  - George, joy
TI  - Preparation of thin films
SN  - 0-8247-8196-1
U1  - 621.38152 
PY  - 1992///
CY  - New York
PB  - Marcel Dekker
KW  - Semiconductors devices,Surface chemistry
KW  - Thin films technology
N1  - incudes bibliographical references and index
ER  -