TY  - BOOK
AU  - Gardner, Julian W.
AU  - Varadan, Vijay K.
TI  - Microsensors, MEMS, and smart devices
SN  - 0-471-86109-X
U1  - 621.381 
PY  - 2001///
CY  - New York
PB  - Johan Wiley
KW  - detectors
KW  - Intelligent control systems
KW  - Microelectromechanical systems
N1  - Includes index bibliography; Book land
ER  -