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	1.	Nano-and micro-electromechanical systems: fundamentals of nano-and microengineering by Sergey Edward Lyshevski by Lyshevski, Sergey Edward Series: Nano-and microscience, engineering, technology, and medicine series Edition: 2nd ed. Material type: Text Language: English Publication details: Boca Raton CRC Press 2005 Availability: Items available for loan: National Institute of Technology, Silchar (1)Call number: 621.381 LYS. Place hold Add to cart (remove)
	2.	MEMS and NEMS systems, devices, and structures by Sergey Edward Lyshevski by Lyshevski, Sergey Edward Series: Nano- and microscience, engineering, technology, and medicine series Material type: Text; Format: print ; Literary form: Not fiction Language: English Publication details: Boca Raton CRC Press 2013 Availability: Items available for loan: National Institute of Technology, Silchar (2)Call number: 621.381 LYS, ... Not available: National Institute of Technology, Silchar: Checked out (1). Place hold Add to cart (remove)

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