| 000 | 00596nam a2200217Ia 4500 | ||
|---|---|---|---|
| 008 | 160330s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a3-540-28922-4 | ||
| 040 | _aCentral Library-NITS | ||
| 041 | _aEnglish | ||
| 082 |
_a620.5 _bCUI |
||
| 100 | _aCui, Zheng | ||
| 245 |
_aMicro -nanofabrication :technologies and applications _cby Zheng Cui |
||
| 260 |
_aLondon _bSpringer _c2005 |
||
| 300 | _ax,304p.:ill. | ||
| 500 | _aIncludes index | ||
| 521 | _bHi-tech book services | ||
| 650 | _aElectron beam lithography | ||
| 650 | _aMicro-nanofabrication | ||
| 650 | _aNanotechnology | ||
| 942 | _cBK | ||
| 999 |
_c12847 _d12847 |
||