000 00574nam a2200217Ia 4500
008 160330s9999||||xx |||||||||||||| ||und||
020 _a0-8247-2431-3
040 _aCentral Library-NITS
041 _aEnglish
082 _a620.5
_bMIC
245 _aMicrofabrication and nanomanufacturing
_cedited by Mark J. Jackson
260 _aLondon
_bTaylor
_c2006
300 _a401p.:ill.
500 _aIncludes index
521 _bHi-Tech
650 _aMicrofabrication
650 _aNanomanufacturing
650 _aNanotechnology
700 _aJackson, Mark J., ed.
942 _cBK
999 _c12852
_d12852