000 00619nam a2200193Ia 4500
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020 _a9780387367989
_c? 129.99 (Rs. 9801.25)
040 _aCentral Library-NITS
041 _aEnglish
082 _a621.3815
_bEL
100 _aEl-Kareh, Badih
245 _aSilicon devices and process integration : deep submicron and nano-scale technologies
_cby Badih El-Kareh
260 _aNew York
_bSpringer
_c2009
300 _axxv,597p.;ill.
500 _aIncludes bibliographical references and index
521 _bRoma books international
650 _aElectronics
942 _cBK
999 _c14512
_d14512