| 000 | 00550nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 160330s9999||||xx |||||||||||||| ||und|| | ||
| 020 |
_a9780387095103 _cRs.6745.00 |
||
| 040 | _aCentral Library-NITS | ||
| 041 | _aEnglish | ||
| 082 | _a621.381ADA | ||
| 100 | _aAdams, Thomas M. | ||
| 245 |
_aIntroductory MEMS: fabrication and applications _cby Thomas M. Adams and Richard A. Layton |
||
| 260 |
_aNew York _bSpringer _c2010 |
||
| 300 | _axv, 444p | ||
| 521 | _bSibyl, Kolkata | ||
| 650 | _aelectronics | ||
| 700 | _aLayton, Richard A. | ||
| 942 | _cBK | ||
| 999 |
_c14616 _d14616 |
||