000 00642nam a2200229Ia 4500
008 160330s9999||||xx |||||||||||||| ||und||
020 _a81-8128-202-7
_cRs.595.00
040 _aCentral Library-NITS
041 _aEnglish
082 _a620.5
_bMIC
245 _aMicromachines as tools for nanotechnology
_cedited by H. Fujita
260 _aNew York
_bSpringer
_c2004
300 _axii, 211p. :ill.
440 _aMicrotechnology and Mems Series
500 _aIncludes bibliographical references
521 _bRBC
650 _aMicrosystem
650 _aNanostructures
650 _aNanotechnology
700 _aFujita, H.,ed.
942 _cBK
999 _c18807
_d18807