000			00710nam a2200241Ia 4500
008			160330s9999||||xx |||||||||||||| ||und||
020			_a9780387245201 _cRs.79848.60
040			_aCentral Library-NITS
041			_aEnglish
082			_a620.5 _bMEM
245			_aMEMS/NEMS handbook techniques and applications _cedited by Cornelius T. Leondes
260			_aNew York _bSpringer _c2006
300			_a5. V. (xviii, 434p. :ill)
500			_aincludes index.
505			_aContents: v. 3. manufacturing methods
521			_bTBS
650			_aManufacturing methods
650			_aMicroelectromechanical methods
650			_aNanotechnology
700			_aLeondes, Cornelius T _4ed.
700			_a.
942			_cBK
999			_c19605 _d19605