| 000 | 00678nam a2200217Ia 4500 | ||
|---|---|---|---|
| 008 | 160330s9999||||xx |||||||||||||| ||und|| | ||
| 020 |
_a0-387-24520-0 _cRs. 79848.60 |
||
| 040 | _aCentral Library-NITS | ||
| 041 | _aEnglish | ||
| 082 |
_a620.5 _bMEM |
||
| 245 |
_aMEMS/NEMS handbook techniques and applications _cedited by Cornelius T.Leondes |
||
| 260 |
_aNew York _bSpringer _c2006 |
||
| 300 | _a5.V(xviii, 386p. :ill) | ||
| 500 | _aincludes index | ||
| 505 | _aContent.V.4.sensors and actuators | ||
| 521 | _bRoma books | ||
| 650 | _aMicro electromechanical system fabrication techniques | ||
| 650 | _aNano technology | ||
| 700 |
_aLeondes, Cornelius T. _4ed. |
||
| 942 | _cBK | ||
| 999 |
_c19606 _d19606 |
||