000 00710nam a2200229Ia 4500
008 160330s9999||||xx |||||||||||||| ||und||
020 _a9780387245201
_cRs. 79848.60
040 _aCentral Library-NITS
041 _aEnglish
082 _a620.5
_bMEM
245 _aMEMS/NEMS handbook techniques and applications
_cedited by Cornelius T. Leondes
260 _aNew York
_bSpringer
_c2006
300 _a5. V. (xviii, 556p. :ill.)
500 _aIncludes index.
505 _aContents: v. 5. medical applications of MOEMS
521 _bRoam books
650 _aManufacturing methods
650 _aMicroelectromechanical methods
650 _aNanotechnology
700 _aLeondes, Cornelius T.
_4ed.
942 _cBK
999 _c19607
_d19607